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Rapid Annealing Furnace (RTP-3S04)

The rapid annealing furnace RTP-3S06 adopts infrared radiation heating technology, which can realize the rapid heating and cooling of large-size samples (4 inches). At the same time, it is equipped with an ultra-high-precision temperature control system to achieve excellent temperature field uniformity and rapid processing of materials. Heat treatment (RTP), rapid annealing (RTA), rapid thermal oxidation (RTO), rapid thermal nitriding (RTN) and other research work have played an important role.
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measurement accuracy:
±1%FS
temperature range:
300-1200℃ Segmented
响应时间:
<5ms
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Model RTP-3S04
Maximum Temperature 1200℃
Maximum Heating Rate 150℃/s
The Fastest Cooling Rate 1200℃--400℃：30℃/s（Under Certain Conditions）
400℃--200℃：10℃/s（Under Certain Conditions）
Temperature Control Accuracy ±0.5℃
Uniformity of Temperature Field ≤1.5%（Set Temperature）
Cavity Cooling Independent Water Cooling
Substrate Cooling Nitrogen Purge
Gas Flow MFC Control
Host Size 450×625×530 （mm）

 

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Features
● Measurable large-size samples: the maximum size of a single-chip sample that can be tested is 4 inches (100mm).
● Fast temperature control and high vacuum: the highest heating rate can reach 100℃/s, and the vacuum degree can reach 10Pa.
● Measurable large-size samples: The maximum size of applicable samples is 4 inches (100mm).
● Fast temperature control and high vacuum: the highest heating rate can reach 150℃/s, and the vacuum degree can reach 10-3Pa.
● Program setting and gas path expansion: It can realize the precise control of different temperature sections, carry out automatic transfer of the cooling section, and can save the process menu for easy recall. MFC is used to precisely control the gas flow to achieve heat treatment under different atmospheres (vacuum, nitrogen, etc.).
● Fully automatic intelligent control: Fully automatic intelligent control is adopted, including temperature, time, gas flow, vacuum, cooling water, etc. can be automatically controlled.
● Ultra-high safety factor: Three safety measures are adopted to protect the safe temperature opening of the furnace door, the thermostat opening authority protection and the equipment emergency stop safety protection to ensure the safety of the equipment in all aspects.
Applications
● Rapid heat treatment, rapid annealing, rapid thermal oxidation, rapid thermal nitriding
● Ion implantation/contact annealing
● SiAu, SiAl, SiMo alloying
● Solar cell bonding
● Resistance sintering
● Heat treatment of low dielectric materials
● Crystallization and densification
● Other thermal process requirements
Customer Case
● Zhejiang University　　　　　　
● Tsinghua University
 
Keyword:
4-inch annealing furnace
RTP
RTA
RTO
RTN
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Self-standing 6-inch rapid annealing furnace
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Infrared Annealing Furnace (RTP-3S01)

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