The 3ω test method is used to detect the thermal conductivity of the heater by using the heat conduction of the micro/nano film material to cause the change of the heater's electrical signal. It can verify the thermal conductivity performance difference of thin film materials at room temperature. The main application scope is the thermal conductivity measurement of micro/nano thin film materials, which can be widely used to assist the research and development of various functional thin film materials. Its coverage includes integrated circuit heat dissipation materials, aerospace materials, thermoelectric materials and devices, and information storage And optoelectronic devices, etc.