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Self-standing 6-inch rapid annealing furnace
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Model | RTP-3S06 |
Maximum Temperature | 1200℃ |
Maximum Heating Rate | 150℃/s |
The Fastest Cooling Rate | 1200℃--400℃:30℃/s(Under Certain Conditions) |
400℃--200℃:10℃/s(Under Certain Conditions) | |
Temperature Control Accuracy | ±0.5℃ |
Uniformity of Temperature Field | ≤1.5%(Set Temperature) |
Cavity Cooling | Independent Water Cooling |
Substrate Cooling | Nitrogen Purge |
Gas Flow | MFC Control |
Host Size |
Keyword:
Rapid annealing furnace
RTP
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